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Proceedings Paper

Optical correlation diagnostics of surfaces
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Paper Abstract

The feasibilities for optical correlation diagnostics of a rough surface with large surface inhomogeneities by determining the transformations of the longitudinal coherence function of the field scattered by such surface are substantiated and implemented. The algorithm of computer processing of the interferograms for reconstruction of the relief of regular surfaces with resolution 0.5 nm is represented.

Paper Details

Date Published: 22 April 2008
PDF: 12 pages
Proc. SPIE 7008, Eighth International Conference on Correlation Optics, 700815 (22 April 2008); doi: 10.1117/12.797207
Show Author Affiliations
Oleg V. Angelsky, Chernivtsi National Univ. (Ukraine)
Oleksander P. Maksimyak, Chernivtsi National Univ. (Ukraine)
Andrey P. Maksimyak, Chernivtsi National Univ. (Ukraine)
Pavel O. Angelsky, Chernivtsi National Univ. (Ukraine)


Published in SPIE Proceedings Vol. 7008:
Eighth International Conference on Correlation Optics

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