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Proceedings Paper

Optical and structural properties of NbxSiyO composite films prepared by metallic co-sputtering process
Author(s): Xinbin Cheng; Bin Fan; Haruo Takahashi; Zhanshan Wang
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Paper Abstract

The optical and structural properties of NbxSiyO composite films prepared by metallic co-sputtering process have been investigated. Compositional modulation of NbxSiyO mixed films is controlled by changing the relative sputtering rates of metallic niobium and silicon. The deposited intermediate index films have been characterized by spectrophotometry. And the dependence of the refractive index on composition is examined and compared with different mixing models. A comparison is made between the mechanical properties of the discrete multilayer and the gradient-index filter. It is demonstrated that the gradient structure exhibits a higher mechanical strength and integrity. Moreover, two typical gradient-index filters have been designed and realized using NbxSiyO composites. Their spectrum performances and microstructures are also presented.

Paper Details

Date Published: 25 September 2008
PDF: 8 pages
Proc. SPIE 7101, Advances in Optical Thin Films III, 71011G (25 September 2008); doi: 10.1117/12.797162
Show Author Affiliations
Xinbin Cheng, Tongji Univ. (China)
Optorun Co., Ltd. (Japan)
Bin Fan, Optorun Co., Ltd. (Japan)
Haruo Takahashi, Optorun Co., Ltd. (Japan)
Zhanshan Wang, Tongji Univ. (China)


Published in SPIE Proceedings Vol. 7101:
Advances in Optical Thin Films III
Norbert Kaiser; Michel Lequime; H. Angus Macleod, Editor(s)

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