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Proceedings Paper

Closed field magnetron sputtering: new generation sputtering process for optical coatings
Author(s): D. R. Gibson; I. Brinkley; E. M. Waddell; J. M. Walls
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Paper Abstract

"Closed field" magnetron (CFM) sputtering offers a flexible and high throughput deposition process for optical coatings and thin films. CFM sputtering uses two or more different metal targets to deposit multilayers comprising a wide range of dielectrics, metals and conductive oxides. Moreover, CFM provides a room temperature deposition process with high ion current density, low bias voltage and reactive oxidation in the entire volume around the rotating substrate drum carrier, thereby producing films over a large surface area at high deposition rate with excellent and reproducible optical properties. Machines based on the Closed Field are scaleable to meet a range of batch and in-line size requirements. Typically, thin film thickness control to <±1% is accomplished simply using time, although optical monitoring can be used for more demanding applications. Fine layer thickness control and deposition of graded index layers is also assisted with a specially designed rotating shutter mechanism. This paper presents data on optical properties for CFM deposited optical coatings, including anti-reflection, thermal control filters, graded coatings, narrowband filters as well as conductive transparent oxides such as indium tin oxide and carbide films. Benefits of the CFM sputter process are described.

Paper Details

Date Published: 25 September 2008
PDF: 12 pages
Proc. SPIE 7101, Advances in Optical Thin Films III, 710108 (25 September 2008); doi: 10.1117/12.797152
Show Author Affiliations
D. R. Gibson, Applied Multilayers Ltd. (United Kingdom)
I. Brinkley, Applied Multilayers Ltd. (United Kingdom)
E. M. Waddell, Applied Multilayers Ltd. (United Kingdom)
J. M. Walls, Applied Multilayers Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 7101:
Advances in Optical Thin Films III
Norbert Kaiser; Michel Lequime; H. Angus Macleod, Editor(s)

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