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Proceedings Paper

Uncertainty consideration of the mirror-interferometer system in nanopositioning and nanomeasuring machines
Author(s): R. Füßl; R. Grünwald; Ph. Kreutzer
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Paper Abstract

The paper deals with the analysis of the uncertainty of high precision long range three-dimensional Nanopositioning and Nanomeasuring Machines (NPMM). Those high-tech instruments consisting of precision 3d-guides, interferometers, a 3d-reference-mirror and nanoprobes, connected by a stabile frame are subject of research. Especially the interferometer mirror system characterizes the precision of such machines. Therefore a new vectorial metrological model will be described to characterize this machine part. Its properties and advantages are shown and the model is used to analyze the uncertainty budget of a concrete Nanopositioning and Nanomeasuring Machine.

Paper Details

Date Published: 11 August 2008
PDF: 6 pages
Proc. SPIE 7064, Interferometry XIV: Applications, 70640L (11 August 2008); doi: 10.1117/12.797058
Show Author Affiliations
R. Füßl, Technische Univ. Ilmenau (Germany)
R. Grünwald, Technische Univ. Ilmenau (Germany)
Ph. Kreutzer, Technische Univ. Ilmenau (Germany)

Published in SPIE Proceedings Vol. 7064:
Interferometry XIV: Applications
Erik L. Novak; Wolfgang Osten; Christophe Gorecki, Editor(s)

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