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Proceedings Paper

Research of spectral description films of amorphous hydrogenated silicon received by a magnetron method with the use of an ionic source
Author(s): Nicolay I. Slipchenko; Mikhail A. Bykov; Alim S. Mazinov
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Paper Abstract

Spectral characteristics films of amorphous hydrogenated silicon received by a magnetron method with use of an ionic source are investigated. As results of researches of temperature dependences on a condition of hydrogen in argon-hydrogen plasma are resulted and a number of laws influencing on electric and optical properties amorphous films is revealed.

Paper Details

Date Published: 22 April 2008
PDF: 10 pages
Proc. SPIE 7008, Eighth International Conference on Correlation Optics, 700811 (22 April 2008); doi: 10.1117/12.797010
Show Author Affiliations
Nicolay I. Slipchenko, Kharkiv National Univ. of Radio Electronics (Ukraine)
Mikhail A. Bykov, Taurida National V. Vernadsky Univ. (Ukraine)
Alim S. Mazinov, Taurida National V. Vernadsky Univ. (Ukraine)


Published in SPIE Proceedings Vol. 7008:
Eighth International Conference on Correlation Optics

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