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Proceedings Paper

Fabrication of high-aspect-ratio hard x-ray zone plates with HSQ plating molds
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Paper Abstract

Fresnel zone plates are important x-ray diffractive optics which offer a focusing resolution approaching the theoretical limit. In hard x-ray region, the refractive indices of all the materials are close to unity, which requests thick zone plate to achieve a reasonable efficiency. It makes high-resolution zone plate extremely difficult to fabricate due to its high aspect ratio. We report a LIGA-like fabrication process employing e-beam resist HSQ as the plating mold material, which is relative simply compared with traditional processes. 1-μm-thick gold zone plates with 80-nm-wide outermost zone have been fabricated with this process.

Paper Details

Date Published: 10 September 2008
PDF: 10 pages
Proc. SPIE 7039, Nanoengineering: Fabrication, Properties, Optics, and Devices V, 70390V (10 September 2008); doi: 10.1117/12.796839
Show Author Affiliations
Ming Lu, Argonne National Lab. (United States)
Leonidas E. Ocola, Argonne National Lab. (United States)
Ralu Divan, Argonne National Lab. (United States)
Derrick C. Mancini, Argonne National Lab. (United States)


Published in SPIE Proceedings Vol. 7039:
Nanoengineering: Fabrication, Properties, Optics, and Devices V
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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