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Proceedings Paper

CdTe x-ray image sensor driven by field emitter array
Author(s): Toru Aoki; Takuya Sakata; Yuichiro Hanawa; Masashi Nakagawa; Hisashi Morii; Akifumi Koike; Yoichiro Neo; Hidenori Mimura
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Paper Abstract

A novel CdTe X-ray image sensor, which was driven by the FEA, was proposed in order to obtain high spatial resolution X-ray images and have demonstrated the principle operation by using the CdTe image sensor with one pixel. We have also fabricated a FEA matrix with 12x12 pixels to obtain X-ray images. For the further improvement of spatial resolution in the CdTe image sensor, we have proposed a novel double-gated FEA with a focusing lens, which was fabricated by using the etch-back method. The double-gated FEA showed a good focusing characteristic without significant decrease of the emission current, when the height of the focus electrode was optimized. The CdTe image sensor driven by the double-gated FEA is promising for an ultra-high-resolution X-ray image sensor.

Paper Details

Date Published: 4 September 2008
PDF: 8 pages
Proc. SPIE 7079, Hard X-Ray, Gamma-Ray, and Neutron Detector Physics X, 707912 (4 September 2008); doi: 10.1117/12.795654
Show Author Affiliations
Toru Aoki, Shizuoka Univ. (Japan)
Takuya Sakata, Shizuoka Univ. (Japan)
Yuichiro Hanawa, Shizuoka Univ. (Japan)
Masashi Nakagawa, Shizuoka Univ. (Japan)
Hisashi Morii, Shizuoka Univ. (Japan)
Akifumi Koike, Shizuoka Univ. (Japan)
Yoichiro Neo, Shizuoka Univ. (Japan)
Hidenori Mimura, Shizuoka Univ. (Japan)


Published in SPIE Proceedings Vol. 7079:
Hard X-Ray, Gamma-Ray, and Neutron Detector Physics X
Arnold Burger; Larry A. Franks; Ralph B. James, Editor(s)

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