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Proceedings Paper

New algorithms and error analysis for sinusoidal phase shifting interferometry
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Paper Abstract

An alternative to the conventional linear phase shift in optical testing interferometers is a sinusoidal phase shift, which has the benefit of relaxing requirements on the phase-shifting mechanism. We propose new phase-demodulation algorithms and provide sensitivity analyses to random noise, nonlinearity, vibrations and calibration error to demonstrate that sinusoidal phase shifting can be as robust and computationally efficient as the more established linear phase-shift techniques.

Paper Details

Date Published: 11 August 2008
PDF: 14 pages
Proc. SPIE 7063, Interferometry XIV: Techniques and Analysis, 70630K (11 August 2008); doi: 10.1117/12.795346
Show Author Affiliations
Peter J. de Groot, Zygo Corp. (United States)
Leslie L. Deck, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 7063:
Interferometry XIV: Techniques and Analysis
Joanna Schmit; Katherine Creath; Catherine E. Towers, Editor(s)

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