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Proceedings Paper

Measuring the phase transfer function of a phase-shifting interferometer
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Paper Abstract

In characterizing the performance of a phase-shifting interferometer, the dependence of the measured height on the spatial frequency is rarely considered. We describe a test mirror with a special height relief that can be used to measure the height transfer function for the interferometer in a fashion analogous to the measurement of the modulation transfer function for the optical imaging system. We fabricated the test mirror at the National Institute of Standards and Technology (NIST) using a lithography-based process. The test mirror has several patterns (reminiscent of moth antennae) with variable spacing in radial direction. We describe the fabrication of the test mirror and its application to test the performance of the interferometer.

Paper Details

Date Published: 11 August 2008
PDF: 8 pages
Proc. SPIE 7064, Interferometry XIV: Applications, 70640C (11 August 2008); doi: 10.1117/12.795243
Show Author Affiliations
Jiyoung Chu, National Institute of Standards and Technology (United States)
Korea Advanced Institute of Science and Technology (Korea (Republic of))
Quandou Wang, National Institute of Standards and Technology (United States)
John P. Lehan, Univ. of Maryland, Baltimore County (United States)
NASA Goddard Space Flight Ctr. (United States)
Guangjun Gao, National Institute of Standards and Technology (United States)
Ulf Griesmann, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 7064:
Interferometry XIV: Applications
Erik L. Novak; Wolfgang Osten; Christophe Gorecki, Editor(s)

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