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Proceedings Paper

Probabilistic method for multiparameter tolerancing in illuminator design
Author(s): Stan Smirnov; Eric Catey
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Paper Abstract

In precision optical instruments, it is often the case that aspects of the illumination system pupil--such as ellipticity, telecentricity, and partial coherence--relate directly to image resolution and placement accuracy. Standard design and analysis tools are often ill-suited to performing tolerance analyses on illuminators, since the figures-of-merit in terms of system performance do not reduce neatly to wavefront and distortion, as they often do for imaging optics. In order to address these deficiencies, we developed a multiparameter tolerancing method based on a probabilistic treatment of errors in an illumination system, and we will describe the work we have done in this paper.

Paper Details

Date Published: 2 September 2008
PDF: 8 pages
Proc. SPIE 7068, Optical System Alignment and Tolerancing II, 706802 (2 September 2008); doi: 10.1117/12.795187
Show Author Affiliations
Stan Smirnov, ASML Wilton (United States)
Eric Catey, ASML Wilton (United States)

Published in SPIE Proceedings Vol. 7068:
Optical System Alignment and Tolerancing II
José M. Sasian; Richard Neil Youngworth, Editor(s)

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