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Proceedings Paper

High-speed AFM probe with micromachined membrane tip
Author(s): Byungki Kim; Byung Hyung Kwak; Faize Jamil
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Paper Abstract

This paper presents a micromachined silicon membrane type AFM tip designed to move nearly 1µm by electrostatic force. Since the tip can be vibrated in small amplitude with AC voltage input and can be displaced up to 1μm by DC voltage input, an additional piezo actuator is not required for scanning of submicron features. The micromachined membrane tips are designed to have 100 kHz ~ 1 MHz resonant frequency. Displacement of the membrane tip is measured by an optical interferometer using a micromachined diffraction grating on a quartz wafer which is positioned behind the membrane tip.

Paper Details

Date Published: 28 August 2008
PDF: 8 pages
Proc. SPIE 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II, 704204 (28 August 2008); doi: 10.1117/12.795050
Show Author Affiliations
Byungki Kim, Univ. of Massachusetts, Lowell (United States)
Byung Hyung Kwak, Univ. of Massachusetts, Lowell (United States)
Faize Jamil, Univ. of Massachusetts, Lowell (United States)


Published in SPIE Proceedings Vol. 7042:
Instrumentation, Metrology, and Standards for Nanomanufacturing II
Michael T. Postek; John A. Allgair, Editor(s)

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