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Proceedings Paper

Transparent film profiling and analysis by interference microscopy
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Paper Abstract

A white-light interferometer with new signal analysis techniques provides 3D top surface and thickness profiles of transparent films. With an additional change from conventional object imaging to pupil-plane imaging, the same instrument platform provides detailed properties of multilayer film stacks, including material optical properties. These capabilities complement conventional surface-topography measurements on the same platform, resulting in a highly flexible tool.

Paper Details

Date Published: 11 August 2008
PDF: 6 pages
Proc. SPIE 7064, Interferometry XIV: Applications, 70640I (11 August 2008); doi: 10.1117/12.794936
Show Author Affiliations
Peter J. de Groot, Zygo Corp. (United States)
Xavier Colonna de Lega, Zygo Corp. (United States)
Martin F. Fay, Zygo Corp. (United States)


Published in SPIE Proceedings Vol. 7064:
Interferometry XIV: Applications
Erik L. Novak; Wolfgang Osten; Christophe Gorecki, Editor(s)

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