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Proceedings Paper

Check of the quality of fabrication of test objects with a trapezoidal profile
Author(s): P. A. Todua; V. P. Gavrilenko; Yu. A. Novikov; A. V. Rakov
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Paper Abstract

A method for objective monitoring of the quality of fabrication of test objects with a trapezoidal profile and large angles of inclination of the sidewalls is proposed. The test objects are created by anisotropic etching of silicon. The method is based on the correlation analysis of the results of experiments performed with scanning electron microscopes (SEMs) and atomic force microscopes (AFMs). In the course of such analysis, coefficients of correlation between the test points on the SEM or AFM signals are calculated. These points correspond to the coordinates of the upper and lower bases of trapezoidal protrusions of a test object structure. The closeness of the correlation coefficients to unity is indication of high quality of the created test object.

Paper Details

Date Published: 9 September 2008
PDF: 8 pages
Proc. SPIE 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II, 704209 (9 September 2008); doi: 10.1117/12.794926
Show Author Affiliations
P. A. Todua, Ctr. for Surface and Vacuum Research (Russia)
V. P. Gavrilenko, Ctr. for Surface and Vacuum Research (Russia)
Yu. A. Novikov, A.M. Prokhorov General Physics Institute (Russia)
A. V. Rakov, A.M. Prokhorov General Physics Institute (Russia)


Published in SPIE Proceedings Vol. 7042:
Instrumentation, Metrology, and Standards for Nanomanufacturing II
Michael T. Postek; John A. Allgair, Editor(s)

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