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Proceedings Paper

Measurement of the parameters of the electron beam of a scanning electron microscope
Author(s): V. P. Gavrilenko; Yu. A. Novikov; A. V. Rakov; P. A. Todua
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Paper Abstract

Results of investigations in the field of measurements of geometrical characteristics of the electron beam of a scanning electron microscope (SEM) are presented. Methods for determining the electron beam diameter are developed and tested on various microscopes. Besides, methods for obtaining the dependence of the electron beam diameter on the beam current, the energy of the primary electrons, and the focusing of the beam are also developed. Finally, method for determining the electron density distribution in the electron beam is proposed.

Paper Details

Date Published: 9 September 2008
PDF: 12 pages
Proc. SPIE 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II, 70420C (9 September 2008); doi: 10.1117/12.794891
Show Author Affiliations
V. P. Gavrilenko, Ctr. for Surface and Vacuum Research (Russia)
Yu. A. Novikov, A.M. Prokhorov General Physics Institute (Russia)
A. V. Rakov, A.M. Prokhorov General Physics Institute (Russia)
P. A. Todua, Ctr. for Surface and Vacuum Research (Russia)


Published in SPIE Proceedings Vol. 7042:
Instrumentation, Metrology, and Standards for Nanomanufacturing II
Michael T. Postek; John A. Allgair, Editor(s)

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