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Proceedings Paper

Multi-wavelength interferometer for high accuracy measurement of long gauge blocks
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Paper Abstract

In the paper the multiwavelength interferometer with automatic data analysis based on phase fraction method is described. It is used to extend measurement range without losing sensitivity, especially to calibrate long gauge blocks. Numerical simulations and experimental work results have been shown to confirm proper functioning of this method. However, stabilization of environmental conditions and light sources has significant influence on correctness of measurement results. To match those requirements measurement system, which will be built for Polish Central Office of Measures, has been designed. This design is based on Twyman-Green interferometer and assumes usage of two highly stabilized laser sources. Optical and mechanical design of this system has been shown. Moreover, system for monitoring and stabilization of environmental conditions is required.

Paper Details

Date Published: 11 August 2008
PDF: 10 pages
Proc. SPIE 7064, Interferometry XIV: Applications, 70640N (11 August 2008); doi: 10.1117/12.794871
Show Author Affiliations
Michal Wengierow, Warsaw Univ. of Technology (Poland)
Leszek Salbut, Warsaw Univ. of Technology (Poland)
Anna Pakula, Warsaw Univ. of Technology (Poland)
Dariusz Lukaszewski, Warsaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 7064:
Interferometry XIV: Applications
Erik L. Novak; Wolfgang Osten; Christophe Gorecki, Editor(s)

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