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Proceedings Paper

Test objects with right-angled and trapezoidal profiles of the relief elements
Author(s): Yu. A. Novikov; V. P. Gavrilenko; A. V. Rakov; P. A. Todua
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Paper Abstract

Comparison is made for parameters and properties of test objects based on the relief structures with right-angled and trapezoidal profiles, which are used for calibration of scanning electron microscopes (SEMs) and atomic force microscopes (AFMs). Methods of calibration of SEMs and AFMs with help of this test objects are presented. Comparative analysis has shown that trapezoidal structures with large angles of sidewall inclination, created by anisotropic etching of silicon with the (100) orientation of its surface, possess the most universal characteristics. Such structures could be used for development of internationally recognized measures of length in the nanometer range for calibration of SEMs and AFMs.

Paper Details

Date Published: 9 September 2008
PDF: 12 pages
Proc. SPIE 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II, 704208 (9 September 2008); doi: 10.1117/12.794834
Show Author Affiliations
Yu. A. Novikov, A.M. Prokhorov General Physics Institute (Russia)
V. P. Gavrilenko, Ctr. for Surface and Vacuum Research (Russia)
A. V. Rakov, A.M. Prokhorov General Physics Institute (Russia)
P. A. Todua, Ctr. for Surface and Vacuum Research (Russia)


Published in SPIE Proceedings Vol. 7042:
Instrumentation, Metrology, and Standards for Nanomanufacturing II
Michael T. Postek; John A. Allgair, Editor(s)

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