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Proceedings Paper

Deposition and characterization of challenging DUV coatings
Author(s): Parag Kelkar; Bruce Tirri; Ron Wilklow; David Peterson
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Paper Abstract

As deep ultra-violet (DUV) wavelength optical systems progress towards higher numerical aperture (NA), at least some of the lens surfaces in the system approach almost complete hemispherical shape and some of the lens surfaces have very high angle of incidence (AOI) requirements. The antireflection (AR) coating designs for such lens surfaces must address intensity apodization due to coating thickness nonuniformity and polarization purity. We present some of the recent results in the area of DUV coatings that highlight these challenges and demonstrate production capability.

Paper Details

Date Published: 29 August 2008
PDF: 8 pages
Proc. SPIE 7067, Advances in Thin-Film Coatings for Optical Applications V, 706708 (29 August 2008); doi: 10.1117/12.794752
Show Author Affiliations
Parag Kelkar, ASML US, Inc. (United States)
Bruce Tirri, ASML US, Inc. (United States)
Ron Wilklow, ASML US, Inc. (United States)
David Peterson, ASML US, Inc. (United States)

Published in SPIE Proceedings Vol. 7067:
Advances in Thin-Film Coatings for Optical Applications V
Jennifer D. T. Kruschwitz; Michael J. Ellison, Editor(s)

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