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Proceedings Paper

Electrical properties of carbon nanotube FETs
Author(s): T. Mizutani; Y. Ohno; S. Kishimoto
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Paper Abstract

The electrical properties of carbon nanotube FETs (CNTFETs) have been studied in detail. The conduction type of the CNTFETs was dependent on the work function of the contact metal, which suggests that Fermi level pinning at the metal/nanotube interface is not strong. Based on the two-probe and four-probe resistance measurements, it has been shown that the carrier transport at the contact is explained by the edge contact model even in the diffusive regime. The chemical doping using F4TCNQ was effective in reducing not only the channel resistance but also the contact resistance. In the CNTFETs fabricated using plasma-enhanced (PE) CVD-grown nanotubes, the drain current of the most of the devices could be modulated by the gate voltage with small OFF current suggesting the preferential growth of the nanotubes with semiconducting behavior. Multichannel top-gate CNTFETs with horizontally-aligned nanotubes as channels have been successfully fabricated using CNT growth on the ST-cut quartz substrate, arc-discharge plasma deposition of the catalyst metal, and ALD gate insulator deposition. The devices show normally-on and n-type conduction property with a relatively-high ON current of 13 mA/mm. CNTFETs with nanotube network have also been fabricated by direct growth on the SiO2/Si substrate using grid-inserted PECVD and using catalyst formed on the channel area of the FETs. The uniformity of the electrical properties of the network channel CNTFETs were very good. Finally, it has been shown that the surface potential profile measurement based on the electrostatic force detection in the scanning probe microscopy was effective in studying the behavior of the CNTFETs such as the transient behavior and the effect of the defects.

Paper Details

Date Published: 4 September 2008
PDF: 10 pages
Proc. SPIE 7037, Carbon Nanotubes and Associated Devices, 703703 (4 September 2008); doi: 10.1117/12.794695
Show Author Affiliations
T. Mizutani, Nagoya Univ. (Japan)
Y. Ohno, Nagoya Univ. (Japan)
S. Kishimoto, Nagoya Univ. (Japan)

Published in SPIE Proceedings Vol. 7037:
Carbon Nanotubes and Associated Devices
Manijeh Razeghi; Didier Pribat; Young Hee Lee, Editor(s)

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