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Proceedings Paper

Ultra-high resolution Raman imaging by optically trapped dielectric microsphere
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Paper Abstract

We show a different approach to perform near-field Raman imaging with sub-diffraction limit spatial resolution. In this approach, a dielectric microsphere is trapped by the excitation laser through optical tweezers technique. The microsphere is used to focus the laser to the sample, and also to collect the scattered Raman signals. We show the capability of this method in imaging various types of samples, such as device sample with 45 nm poly-Si gates with SiGe stressors and gold nanopatterns. This method is easy to perform, has better repeatability, and generates stronger signal as compared to the conventional near-field Raman techniques.

Paper Details

Date Published: 28 August 2008
PDF: 7 pages
Proc. SPIE 7033, Plasmonics: Nanoimaging, Nanofabrication, and Their Applications IV, 70330E (28 August 2008); doi: 10.1117/12.794692
Show Author Affiliations
Z. X. Shen, Nanyang Technological Univ. (Singapore)
Johnson Kasim, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 7033:
Plasmonics: Nanoimaging, Nanofabrication, and Their Applications IV
Satoshi Kawata; Vladimir M. Shalaev; Din Ping Tsai, Editor(s)

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