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Proceedings Paper

Far-infrared Fizeau interferometer for large aspheric mirror
Author(s): Yongqian Wu; Yudong Zhang; Fan Wu; Qiang Chen; Lianghong Li
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Paper Abstract

The design and system performance of a far-infrared interferometer with which to test rough aspheric surfaces are presented. It is based on the optical configuration of classical Fizeau interferometer. A CO2 laser is used as a light source operating at a 10.6μm wavelength. A He-Ne laser is introduced into the interferometer to solve problems concerning with alignment. The measuring error(RMS) of the interferometer is less than λ/200(λ=10.6μm), this accuracy is able to fulfill the need of grinding primary mirror.

Paper Details

Date Published: 11 August 2008
PDF: 6 pages
Proc. SPIE 7064, Interferometry XIV: Applications, 70640S (11 August 2008); doi: 10.1117/12.794415
Show Author Affiliations
Yongqian Wu, Institute of Optics and Electronics (China)
Yudong Zhang, Institute of Optics and Electronics (China)
Fan Wu, Institute of Optics and Electronics (China)
Qiang Chen, Institute of Optics and Electronics (China)
Lianghong Li, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 7064:
Interferometry XIV: Applications
Erik L. Novak; Wolfgang Osten; Christophe Gorecki, Editor(s)

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