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Proceedings Paper

Shadowing growth of biaxially textured nanostructured films
Author(s): Toh-Ming Lu; Fu Tang; Gwo-Ching Wang
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Paper Abstract

Microstructure of a nanostructured film is not only of fundamental scientific interest but also an important subject from the practical point of view. In this paper we will discuss the formation of biaxially textured film under extreme shadowing during growth. Biaxially textured films are not single crystals, but they possess both the out-of-plane and in-plane preferred orientations. We will also discuss our newly developed reflection high-energy electron diffraction (RHEED) surface pole figure technique and how we employ this technique to capture the evolution of growth front texture.

Paper Details

Date Published: 10 September 2008
PDF: 7 pages
Proc. SPIE 7041, Nanostructured Thin Films, 704107 (10 September 2008); doi: 10.1117/12.794217
Show Author Affiliations
Toh-Ming Lu, Rensselaer Polytechnic Institute (United States)
Fu Tang, Rensselaer Polytechnic Institute (United States)
Gwo-Ching Wang, Rensselaer Polytechnic Institute (United States)

Published in SPIE Proceedings Vol. 7041:
Nanostructured Thin Films
Geoffrey B. Smith; Akhlesh Lakhtakia, Editor(s)

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