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Proceedings Paper

Optical heterodyne laser encoder for in-plane nanopositioning
Author(s): Chyan-Chyi Wu; Cheng-Chih Hsu; Ju-Yi Lee; Cheng-Yang Liu
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Paper Abstract

Laser encoders as an optical displacement measurement technique have many applications such as modern manufacturing, scanning probe microscopy (SPM) and nanomanipulation. For the measurement scale down to the nanometer range, the stability, sensitivity and tolerance to dynamic runout are the key issues for laser encoders. This paper presents a novel laser encoder for sub-nanometer displacement measurement. It is based on optical heterodyne interferometry and conjugate optics with a symmetric and quasi-common-path optical configuration. It offers high stability, high resolution, low uncertainty displacement measurements and can break through the dynamic runout problem in laser encoders. Experimental results reveal that the laser encoder can detect a displacement variation of 26 pm, and can thus be applied to sub-nanometer or even picometer positioning.

Paper Details

Date Published: 11 August 2008
PDF: 7 pages
Proc. SPIE 7063, Interferometry XIV: Techniques and Analysis, 70631A (11 August 2008); doi: 10.1117/12.793710
Show Author Affiliations
Chyan-Chyi Wu, Industrial Technology Research Institute (Taiwan)
Cheng-Chih Hsu, Industrial Technology Research Institute (Taiwan)
Ju-Yi Lee, National Central Univ. (Taiwan)
Cheng-Yang Liu, Industrial Technology Research Institute (Taiwan)


Published in SPIE Proceedings Vol. 7063:
Interferometry XIV: Techniques and Analysis
Joanna Schmit; Katherine Creath; Catherine E. Towers, Editor(s)

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