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Proceedings Paper

Analysis of the uniqueness of an inverse grating characterization method
Author(s): Bastian Trauter; Jochen Hetzler; Karl-Heinz Brenner
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Paper Abstract

We propose a method for the characterization of one- and two-dimensional diffraction gratings by means of the measurement of diffraction efficiencies. The method is based on the comparison of measured and calculated efficiencies. For the numerical calculation we use the Rigorous Coupled Wave Analysis RCWA and an optimization algorithm to determine the grating shape that fits best to the measured data. We analyzed in which cases the method is able to determine the grating shape without ambiguity and which measurement parameters should be used. By systematically analyzing a given inverse problem, we try to derive the theoretical limits of the method.

Paper Details

Date Published: 29 August 2008
PDF: 9 pages
Proc. SPIE 7065, Reflection, Scattering, and Diffraction from Surfaces, 70650T (29 August 2008); doi: 10.1117/12.793688
Show Author Affiliations
Bastian Trauter, Carl Zeiss SMT (Germany)
Univ. of Heidelberg (Germany)
Jochen Hetzler, Carl Zeiss SMT (Germany)
Karl-Heinz Brenner, Univ. of Heidelberg (Germany)

Published in SPIE Proceedings Vol. 7065:
Reflection, Scattering, and Diffraction from Surfaces
Zu-Han Gu; Leonard M. Hanssen, Editor(s)

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