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Proceedings Paper

Accurately measuring a surface by using a computer-generated hologram
Author(s): Hua Liu; Zhenwu Lu; Honxin Zhang
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Paper Abstract

By using a CGH test plate fabricated with our equipment and techniques, we measured a perfect sphere surface. The measurement result is quantified into four parts: the figure error from the spherical surface under test; the figure error from the spherical reference surface; the error from hologram and the adjustment error from misalignment. The measurement result removed from the later three errors, shown excellent agreement with Zygo test of the same sphere surface. This verified that the measurement accuracy by using this kind of CGH could be very high.

Paper Details

Date Published: 11 August 2008
PDF: 8 pages
Proc. SPIE 7064, Interferometry XIV: Applications, 70640P (11 August 2008); doi: 10.1117/12.793597
Show Author Affiliations
Hua Liu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Zhenwu Lu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Honxin Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 7064:
Interferometry XIV: Applications
Erik L. Novak; Wolfgang Osten; Christophe Gorecki, Editor(s)

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