Share Email Print
cover

Proceedings Paper

Micro- and nano-robotic technologies
Author(s): Toshio Fukuda; Masahiro Nakajima; Pou Liu
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Today robotic technology can be developed and advanced a lot from industrial robotic manipulation to the micro and nano manipulations. We have been proposed "Nano Laboratory" consisted of the capabilities of nanofabrication, nanoinstrumentaion and nanoassembly to make three dimensional structure, devices and systems in the nanoworld. First the nanorobotic manipulation system is introduced to realize these capabilities inside a scanning electron microscope (SEM) and a transmission electron microscope (TEM). Then some precursors are introduced into the working small space in the nanoworld, so that the cutting, bending and fixing operation in the nanoworld will be realized using nanomanipulator, electron-bean-induced deposition (EBID) and other methodologies as in the macro world. After making the three dimensional structure, nano devices such as sensor and actuator can be fabricated.

Paper Details

Date Published: 22 April 2008
PDF: 12 pages
Proc. SPIE 6979, Independent Component Analyses, Wavelets, Unsupervised Nano-Biomimetic Sensors, and Neural Networks VI, 69790U (22 April 2008); doi: 10.1117/12.793422
Show Author Affiliations
Toshio Fukuda, Nagoya Univ. (Japan)
Masahiro Nakajima, Nagoya Univ. (Japan)
Pou Liu, Nagoya Univ. (Japan)


Published in SPIE Proceedings Vol. 6979:
Independent Component Analyses, Wavelets, Unsupervised Nano-Biomimetic Sensors, and Neural Networks VI
Harold H. Szu; F. Jack Agee, Editor(s)

© SPIE. Terms of Use
Back to Top