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Proceedings Paper

Tool-induced hotspot fixing flow for high volume products
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Paper Abstract

Flow of fixing of hot spot induced by optical variation among exposure tools is discussed for quick ramp-up of high volume products. To achieve robust pattern formation for optical variation, following hot spot detection and fixing approaches are introduced: i) at the design stage, hot spot detection within the optical variation space and hot spot fixing by layout modification or OPC optimization, ii) in order to efficiently detect hot spots within the optical variation space, lithography simulation by combinations of optical parameters determined by the design of experiment (DoE), iii) at the manufacturing stage, hot spot fixing by adjustment of optical parameters using the multi-variable optimization to match OPE between the primary and secondary exposure tool.

Paper Details

Date Published: 20 May 2008
PDF: 7 pages
Proc. SPIE 7028, Photomask and Next-Generation Lithography Mask Technology XV, 70283I (20 May 2008); doi: 10.1117/12.793125
Show Author Affiliations
Hiromitsu Mashita, Toshiba Corp. (Japan)
Toshiya Kotani, Toshiba Corp. (Japan)
Fumiharu Nakajima, Toshiba Corp. (Japan)
Hidefumi Mukai, Toshiba Corp. (Japan)
Kazuya Sato, Toshiba Corp. (Japan)
Satoshi Tanaka, Toshiba Corp. (Japan)
Kohji Hashimoto, Toshiba Corp. (Japan)
Soichi Inoue, Toshiba Corp. (Japan)


Published in SPIE Proceedings Vol. 7028:
Photomask and Next-Generation Lithography Mask Technology XV
Toshiyuki Horiuchi, Editor(s)

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