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Proceedings Paper

Surface energy control techniques for photomask fabrication and their characterizations with scanning probe microscopy
Author(s): Masaaki Kurihara; Sho Hatakeyama; Kouji Yoshida; Makoto Abe; Daisuke Totsukawa; Yasutaka Morikawa; Hiroshi Mohri; Naoya Hayashi
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Paper Details

Date Published: 19 May 2008
PDF: 7 pages
Proc. SPIE 7028, Photomask and Next-Generation Lithography Mask Technology XV, 70282T (19 May 2008); doi: 10.1117/12.793099
Show Author Affiliations
Masaaki Kurihara, Dai Nippon Printing Co., Ltd. (Japan)
Sho Hatakeyama, Dai Nippon Printing Co., Ltd. (Japan)
Kouji Yoshida, Dai Nippon Printing Co., Ltd. (Japan)
Makoto Abe, Dai Nippon Printing Co., Ltd. (Japan)
Daisuke Totsukawa, Dai Nippon Printing Co., Ltd. (Japan)
Yasutaka Morikawa, Dai Nippon Printing Co., Ltd. (Japan)
Hiroshi Mohri, Dai Nippon Printing Co., Ltd. (Japan)
Naoya Hayashi, Dai Nippon Printing Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 7028:
Photomask and Next-Generation Lithography Mask Technology XV
Toshiyuki Horiuchi, Editor(s)

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