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Proceedings Paper

Thin-line de-sense capability for database mode inspections with KLA-Tencor TeraScanHR
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Paper Abstract

Sub-resolution assist features (SRAF) are a common optical proximity correction method to preserve main feature patterns upon imaging into a photoresist during the lithographic process. The presence of SRAF can often reduce the inspectability and usable sensitivity in high resolution inspections of these reticles. KLA-Tencor has developed an improved Thin-Line De-sense capability for Die-to-Database inspections (dbTLD) on the TeraScanHR that addresses this challenge. The dbTLD capability provides sensitivity control focused on SRAF, thus improving inspectability without compromising high sensitivity to main features. The key feature of the improved dbTLD capability is that it provides greater flexibility to effectively de-sense non-critical defects on SRAF in variable sizes oriented at any angle and in variety of shapes including challenging L- and U-shaped structures. This paper will demonstrate the value of dbTLD on improving inspectability where aggressive SRAF structures exist. The selective application of sensitivity on main features and assist features is the key to improvement in database inspections without impacting throughput.

Paper Details

Date Published: 19 May 2008
PDF: 7 pages
Proc. SPIE 7028, Photomask and Next-Generation Lithography Mask Technology XV, 70282J (19 May 2008); doi: 10.1117/12.793089
Show Author Affiliations
Arosha Goonesekera, KLA-Tencor Corp. (United States)
Isaac Lee, KLA-Tencor Corp. (United States)
Bo Mu, KLA-Tencor Corp. (United States)
Aditya Dayal, KLA-Tencor Corp. (United States)

Published in SPIE Proceedings Vol. 7028:
Photomask and Next-Generation Lithography Mask Technology XV
Toshiyuki Horiuchi, Editor(s)

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