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Proceedings Paper

Structural, electrical, and optical characterization of nanocrystalline diamond films deposited by HFCVD method
Author(s): Yan Jin; Linjun Wang; Jianmin Liu; Jian Huang; Run Xu; Weimin Shi; Yiben Xia
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Paper Abstract

The structure, electrical and optical properties of nano-crystalline diamond (NCD) films deposited by hot-filament chemical vapor deposition (HFCVD) method, are reported. The influence of the carbon concentration during the film deposition on the Raman scattering, optical gap, optical constants (n and k) and dark-current is investigated. Under a higher carbon concentration during deposition, the NCD film obtained with a smaller grain size, has a lower optical gap, refractive index and electrical resistivity. These changes with the carbon concentration are attributed to the high amount of sp2 bonded carbons and other non-diamond phase, which is confirmed by Raman scattering measurements.

Paper Details

Date Published: 11 March 2008
PDF: 4 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 698417 (11 March 2008); doi: 10.1117/12.792389
Show Author Affiliations
Yan Jin, Shanghai Univ. (China)
Shanghai Jiangong Material Huangang Ready-Mixed Concrete Co., Ltd. (China)
Linjun Wang, Shanghai Univ. (China)
Jianmin Liu, Shanghai Univ. (China)
Jian Huang, Shanghai Univ. (China)
Run Xu, Shanghai Univ. (China)
Weimin Shi, Shanghai Univ. (China)
Yiben Xia, Shanghai Univ. (China)

Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications

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