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Proceedings Paper

Spectroscopic ellipsometry measurement and simulation of mesoporous TiO2 multilayer films
Author(s): Lu Huang; Yue Shen; Feng Gu; Xudong Xu; Jiancheng Zhang
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Paper Abstract

Ordered mesoporous titania thin films have been grown on Si and ITO substrates by evaporation-induced self-assembly (EISA) progress. The films have well-organized honeycomb structures and consisted of anatase nanocrystallites according to the results of HRTEM. Between the regions of wavelength from 400 nm to 1250 nm, the simulation data of the refractive index coefficient (n) is decreased with the wavelength increasing. In contrast, the simulation of the extinction coefficient (k) is decreased quickly before the wavelength of 700 nm, and it is enhanced gradually with the wavelength increasing after the extreme value at about 700 nm. Simulation of n and k of mesoporous TiO2 multilayer films from the data of transmission spectra are helpful to remedy the lack of spectroscopic ellipsometry measurement, especially in the regions of weak absorbance.

Paper Details

Date Published: 11 March 2008
PDF: 4 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 698416 (11 March 2008); doi: 10.1117/12.792388
Show Author Affiliations
Lu Huang, Shanghai Univ. (China)
Yue Shen, Shanghai Univ. (China)
Shanghai Institute of Technical Physics (China)
Feng Gu, Shanghai Univ. (China)
Xudong Xu, Shanghai Univ. (China)
Jiancheng Zhang, Shanghai Univ. (China)


Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications

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