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Proceedings Paper

Extreme ultraviolet multilayer mirrors for astronomical observation
Author(s): Zhanshan Wang; Jingtao Zhu; Rui Chen; Jing Xu; Fengli Wang; Zhong Zhang; Jing Xu; Wenjuan Wu; Liqin Liu; Huijing Zhang; Da Xu; Hui Jiang; Lingyan Chen; Hongjun Zhou; Tonglin Huo; Mingqi Cui; Yidong Zhao
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Paper Abstract

Multilayer mirrors are the important optical elements for astronomical observation at extreme ultraviolet region. In this article, three kinds of multilayer mirrors were introduced for solar observation and magnetosphere observation. Mo/Si multilayer mirror was fabricated for solar Fe-XII emission line at wavelength of 19.5nm. For solar He-II radiation at 30.4 nm, Mo/Si, Si/SiC, Si/C, Si/B4C and Mg/SiC multilayers were investigated, and the measurements results shows that Mg/SiC multilayer provides the highest reflectivity of 43.8% at incidence angle of 5 degree. The third multilayer mirror was a dual-function mirror used for earth's magnetosphere observation, which requires high-reflective for He-II emission line at wavelength of 30.4nm but anti-reflectance at 58.4nm from ionosphere He-I emission. Using aperiodic Mg/SiC multilayer, the dual-function multilayer mirror was designed. Compared to periodic multilayer, the dual-function multilayer suppresses the reflectivity for He-I at 58.4nm from 2.2% to 0.1%, without loss of the reflection for He-II at 30.4nm, significantly.

Paper Details

Date Published: 11 March 2008
PDF: 6 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 698433 (11 March 2008); doi: 10.1117/12.792386
Show Author Affiliations
Zhanshan Wang, Tongji Univ. (China)
Jingtao Zhu, Tongji Univ. (China)
Rui Chen, Tongji Univ. (China)
Jing Xu, Tongji Univ. (China)
Fengli Wang, Tongji Univ. (China)
Zhong Zhang, Tongji Univ. (China)
Jing Xu, Tongji Univ. (China)
Wenjuan Wu, Tongji Univ. (China)
Liqin Liu, Tongji Univ. (China)
Huijing Zhang, Tongji Univ. (China)
Da Xu, Tongji Univ. (China)
Hui Jiang, Tongji Univ. (China)
Lingyan Chen, Tongji Univ. (China)
Hongjun Zhou, Univ. of Science and Technology of China (China)
Tonglin Huo, Univ. of Science and Technology of China (China)
Mingqi Cui, Institute of High Energy Physics (China)
Yidong Zhao, Institute of High Energy Physics (China)


Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications
Wenzhong Shen; Junhao Chu, Editor(s)

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