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Proceedings Paper

Electrical and optical properties of Na+-doped ZnO thin films prepared by sol-gel method
Author(s): Ying-wei Li; Chun-fang Lin; Xiao Zhou; Ji Ma; Xing-wen Zhu
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Paper Abstract

Na+-doped ZnO thin films (Zn1-xNaxO, x=0-0.20) were prepared on Si<100> substrate by sol-gel method using zinc acetate and sodium carbonate as starting materials. The electrical properties, including the conducting type and the carrier concentration, as well as the optical properties of the so-obtained films were investigated by four-point probe van der Pauw method and photoluminescence (PL) spectroscopy. After doping Na+, the conductive type of ZnO films changed to p from n-type, indicating that Na+ can act as an acceptor to occupy the Zn2+ sites in ZnO lattice. The resistivity, Hall mobility, and the hole concentration of the film with x=0.10 were 75.7 Ω•cm, 2.1 cm2/V s and 2.955×1016/cm3, respectively. The PL results showed that there were a narrow near-band-edge (NBE) emission line and a broad deep-level (DL) emission for all the films with and without Na+ dopants. A slight blue-shift from about 383nm to 380nm of NBE line was observed for the films after doping Na+.

Paper Details

Date Published: 11 March 2008
PDF: 4 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69840U (11 March 2008); doi: 10.1117/12.792359
Show Author Affiliations
Ying-wei Li, Shanghai Univ. (China)
Chun-fang Lin, Shanghai Institute of Materials (China)
Xiao Zhou, Shanghai Univ. (China)
Ji Ma, Shanghai Univ. (China)
Xing-wen Zhu, Shanghai Univ. (China)


Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications

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