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Proceedings Paper

Fabrication and physical properties of high-quality zinc oxide thin films
Author(s): Bo Zhou; Jinliang Wang; Yadong Pan; Li Wang; Hongyong Peng
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Paper Abstract

In this paper, ZnO thin films with a polycrystalline preferential orientation and low surface roughness were successively achieved on Si (100) substrate by RF magnetron sputtering techniques under optimized experimental parameters. In our sputtered samples, the average grain size is around 15~23 nm calculated from Scherrer Formula, and transmittance in visible range was over 80% measured by spectrophotometer, d33 equal to 27.5 pV/m measured by Piezoelectric Force Microscopy (PFM), surface roughness is below 3.00 nm and a good (002) plane orientation growth observed from XRD patterns. All the excellence properties of the ZnO thin films we acquired signal them are promising materials to be applied in electronic devices.

Paper Details

Date Published: 11 March 2008
PDF: 4 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69840S (11 March 2008); doi: 10.1117/12.792356
Show Author Affiliations
Bo Zhou, Beihang Univ. (China)
Jinliang Wang, Beihang Univ. (China)
Yadong Pan, Beihang Univ. (China)
Li Wang, Beihang Univ. (China)
Hongyong Peng, Beihang Univ. (China)

Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications

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