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Proceedings Paper

Structural investigation and barrier properties of a-C:H thin films on polymer by PECVD
Author(s): Yuefei Zhang; Xinchao Bian; Qiang Chen; Yu Wang; Guangqiu Zhang; Yuanjing Ge
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Paper Abstract

In this paper, a thin amorphous hydrogenated carbon films were deposited on polyethylene terephthalate (PET) by means of capacitive coupled RF plasma-enhanced chemical vapor deposition (PECVD) using a mixture of CH4 with Ar gas as a source. The chemical composition of the deposited films were analyzed by fourier transform infrared (FTIR) spectroscopy, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), laser Roman spectroscopy(LRS). And the microgram of the film was detected atomic force microscopy (AFM). The barrier properties were examined by water vapour permeation. The results show that the barrier performance of water vapor permeation in PET coated by hydrogenated carbon film was decreased from 86.16 (g/m2d) to 10.68 (g/m2d) in experiments.

Paper Details

Date Published: 11 March 2008
PDF: 5 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69840P (11 March 2008); doi: 10.1117/12.792285
Show Author Affiliations
Yuefei Zhang, Beijing Institute of Graphic Communication (China)
Xinchao Bian, Beijing Institute of Graphic Communication (China)
Qiang Chen, Beijing Institute of Graphic Communication (China)
Yu Wang, Beijing Institute of Graphic Communication (China)
Guangqiu Zhang, Beijing Institute of Graphic Communication (China)
Yuanjing Ge, Beijing Institute of Graphic Communication (China)


Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications

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