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Proceedings Paper

Wurtzite structure high Mg content ZnMgO thin films deposited by oxygen-plasma enhanced pulsed laser deposition
Author(s): Yanfei Gu; Xiaomin Li; J. F. Kong; C. Yang; W. Z. Shen; Y. W. Zhang; W. D. Yu; X. D. Gao
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Paper Abstract

Wurtzite structure ZnMgO thin films with the energy gap (Eg) of 4.2 eV were deposited by oxygen-plasma enhanced pulsed laser deposition (PEPLD) on quartz glass. Oxygen-plasma increases the Zn content in ZnMgO thin film, which induced the evolution from cubic to hexagonal structure. The effects of target-substrate (T-S) distance on the band gap and crystal quality of ZnMgO thin film deposited by PEPLD were studied by transmittance spectra and Raman. The band gap of ZnMgO increased from 3.84 eV to 4.03 eV and the crystal quality decrease gradually when the T-S distance decreased from 9 cm to 5 cm.

Paper Details

Date Published: 11 March 2008
PDF: 4 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69842R (11 March 2008); doi: 10.1117/12.792272
Show Author Affiliations
Yanfei Gu, Shanghai Institute of Ceramics (China)
Xiaomin Li, Shanghai Institute of Ceramics (China)
J. F. Kong, Shanghai Jiao Tong Univ. (China)
C. Yang, Shanghai Institute of Ceramics (China)
W. Z. Shen, Shanghai Jiao Tong Univ. (China)
Y. W. Zhang, Shanghai Institute of Ceramics (China)
W. D. Yu, Shanghai Institute of Ceramics (China)
X. D. Gao, Shanghai Institute of Ceramics (China)


Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications

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