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Proceedings Paper

Study of Si/SiO2 hybrid antireflective coatings on SLD prepared by DSEBET
Author(s): M. X. Sun; M. Q. Tan; M. Zhao
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Paper Abstract

We introduce a double source electron beam evaporation (DSEBET) technique in this paper. The refractive index coatings were fabricated on K9 glass substrate by adjusting the evaporation rates of two independent sources. The coatings, which were described by atomic force microscopy (AFM), show good compactness and homogeneity. The antireflective (AR) coatings were fabricated on Superluminescent Diodes (SLD) by DSEBET. The hybrid AR coatings on the facets of SLD were prepared in evaporation rates of 0.22nm/s and 0.75nm/s for silicon and silicon dioxide, respectively. The results of AFM and spectral performance of coated SLD show that DSEBET has a promising future in preparing the coatings on optoelectronic devices.

Paper Details

Date Published: 11 March 2008
PDF: 4 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69842P (11 March 2008); doi: 10.1117/12.792269
Show Author Affiliations
M. X. Sun, Institute of Semiconductors (China)
M. Q. Tan, Institute of Semiconductors (China)
M. Zhao, Institute of Semiconductors (China)


Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications

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