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Proceedings Paper

Rigorous coupled-wave analysis for the optical character of multi-layer dielectric thin film
Author(s): Weijin Kong; Cuichun Ling; Maojin Yun; Xin Sun; Jianda Shao; Zhengxiu Fan
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Paper Abstract

The optical property of multi-layer dielectric thin film is determined by its operation on the more or less complete cancellation of the light reflected at the upper and lower of the multi-layer interface of the thin film. An enhanced, numerically stable transmittance matrix approach based on rigorous coupled-wave analysis (RCWA) is applied to the analysis of optical character for multi-layer dielectric thin film. A design of a thin film stack used in multi-lay dielectric grating was presented by using the method of RCWA. The numerical calculation shows that RCWA is a relatively straightforward and deterministic technique for analysis the optical property of multi-layer dielectric thin film.

Paper Details

Date Published: 11 March 2008
PDF: 4 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69843U (11 March 2008); doi: 10.1117/12.792248
Show Author Affiliations
Weijin Kong, Qingdao Univ. (China)
Cuichun Ling, Qingdao Univ. (China)
Maojin Yun, Qingdao Univ. (China)
Xin Sun, Qingdao Univ. (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications

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