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Proceedings Paper

High diffraction efficiency for multi-layer dielectric gratings with rectangular groove
Author(s): Weijin Kong; Maojin Yun; Cuichun Ling; Xin Sun; Jianda Shao; Zhengxiu Fan
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Paper Abstract

The purpose of this study is dedicated to the new design of the Multi-layer dielectric grating with the best performance giving a highly diffraction efficiency in the -1 order, by using the rigorous coupled wave Analysis (RCWA). The formulation for the implementation of the RCWA for multi-layer dielectric gratings incorporating the developed enhanced transmittance approach is presented. An optimized design of multi-layer dielectric grating working at 1053-nm with TE polarized light and 51.2° incident can obtain the diffraction efficiency of 99%.

Paper Details

Date Published: 11 March 2008
PDF: 5 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69843T (11 March 2008); doi: 10.1117/12.792247
Show Author Affiliations
Weijin Kong, Qingdao Univ. (China)
Maojin Yun, Qingdao Univ. (China)
Cuichun Ling, Qingdao Univ. (China)
Xin Sun, Qingdao Univ. (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications

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