Share Email Print
cover

Proceedings Paper

Fabrication and NO2 sensing properties of ChemFET sensors with self-assembly PAN/PSSA sensitive films based on nano-Au surface
Author(s): Yadong Jiang; Huiling Tai; Guangzhong Xie; Junsheng Yu
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Au colloids were synthesized using NaBH4 or Na3-sitrate with ethanol as solvent and nano-Au thin films were built up by the electrostatic self-assembly technique. The self-assembled polyaniline (PAN) and poly (styrenesulfonic acid) (PSSA) composite films (PAN/PSSA) were obtained by doping-induced deposition effect above the nano-Au film surface. A novel chemical field-effect transistor (ChemFET) gas sensor was designed and fabricated with PAN/PSSA composite films deposited on the gate area of MOSFET replacing the gate metal, and the gas-sensing properties of the ChemFET sensor to NO2 was examined. The effects of the back-surface voltage and the channel length/width of ChemFET sensor on the gas-sensing characteristics were investigated. The results showed that Au colloids synthesized using ethanol as solvent was a monodisperse suspension and had more uniform distribution, and the PAN/PSSA composite film on the nano-Au film surface was uniform and firm. The optimum response of the ChemFET sensor could be obtained when the channel length and the ratio of channel width to channel length were 10μm and 10, respectively.

Paper Details

Date Published: 11 March 2008
PDF: 4 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69843Q (11 March 2008); doi: 10.1117/12.792244
Show Author Affiliations
Yadong Jiang, Univ. of Electronic Science and Technology of China (China)
Huiling Tai, Univ. of Electronic Science and Technology of China (China)
Guangzhong Xie, Univ. of Electronic Science and Technology of China (China)
Junsheng Yu, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications

© SPIE. Terms of Use
Back to Top