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Proceedings Paper

Research on the realization of high precision RC array through IC thin film technology
Author(s): Fangkui Sun; Wei Jiang; Di Wu; Shoutao Zhang
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Paper Abstract

This paper discusses some advantages of IC thin film technology in realizing RC array that traditional thick film technology does not have, which make IC thin film technology the mainstream in realizing RC array devices. Then it focuses on how to use IC thin film technology to realize high precision RC array, some practical techniques are put forward, based on our experiments and experience in layout design and fabrication. These techniques are demonstrated separately according to the respective characteristics of resistor and capacitor. Finally, the different ranges of precision of the devices tested in different ways through specific experiments are given.

Paper Details

Date Published: 11 March 2008
PDF: 4 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69843I (11 March 2008); doi: 10.1117/12.792197
Show Author Affiliations
Fangkui Sun, Harbin Institute of Technology (China)
Wei Jiang, Heilongjiang Bada Universal Semiconductor Inc. (China)
Di Wu, Heilongjiang Bada Universal Semiconductor Inc. (China)
Shoutao Zhang, Heilongjiang Bada Universal Semiconductor Inc. (China)


Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications

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