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Proceedings Paper

Design and properties of STW resonators on AT-quartz
Author(s): Hualei Wang; Yu Shi; Hui Zhong; Xiangdong Jiang
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Paper Abstract

Surface transverse waves (STW) resonators exhibit substantial advantages over conventional surface acoustic wave (SAW) resonators without further demands for new materials or improved design and technology. They demonstrate higher operating frequencies, better temperature stability, higher intrinsic material quality and etc. In this work, the low loss and high quality factor STW with center frequency at 421 MHz fabricated with a line width of 3 μm were uniquely designed and fabricated on AT quartz substrate. The insertion loss of the device was as low as 2 dB, and the loaded quality factor was as high as 1000. Insertion losses as function of structure parameters are discussed.

Paper Details

Date Published: 11 March 2008
PDF: 4 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69843H (11 March 2008); doi: 10.1117/12.792196
Show Author Affiliations
Hualei Wang, Univ. of Electronic Science and Technology of China (China)
Yu Shi, Univ. of Electronic Science and Technology of China (China)
Hui Zhong, Univ. of Electronic Science and Technology of China (China)
Xiangdong Jiang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications

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