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Proceedings Paper

Pulsed-laser deposition of thin Fe film on Cu(100): a kinetic Monte Carlo simulation
Author(s): Juanmei Hu; Fengmin Wu; Yuzhang Fang
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Paper Abstract

The initial stages of multilayer Fe thin film on Cu(100) surface prepared by pulsed-laser deposition(PLD) were simulated by means of kinetic Monte Carlo(kMC) method. We focus on examining the effect of high instantaneous deposition rate and energetic adatoms on nucleation and the surface roughness of Fe film on Cu(100) surface. The simulation results show that high instantaneous deposition rate alone is insufficient to explain the layer-by-layer growth in PLD, and it is the combination of the kinetic energy and high instantaneous deposition rate that leads to improved quality of the film surface.

Paper Details

Date Published: 11 March 2008
PDF: 4 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 698407 (11 March 2008); doi: 10.1117/12.792181
Show Author Affiliations
Juanmei Hu, Zhejiang Normal Univ. (China)
Fengmin Wu, Zhejiang Normal Univ. (China)
Yuzhang Fang, Zhejiang Normal Univ. (China)


Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications

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