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Proceedings Paper

Multi-layer antireflection coatings for silicon solar cells using a sol-gel technique
Author(s): B. B. Shi; Z. Q. Ma; X. Tang; C. B. Feng
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Paper Abstract

In order to improve the opto-electronic conversion efficiency of solar cells, antireflection coatings (ARCs) have been drew a great attention for the application in the terrene. Generally, the coating is obtained by vacuum processing such as thermal evaporation, reactive sputtering and plasma-enhanced chemical vapor deposition (PECVD). In this work, multi-layer antireflection coatings have been performed by a modified sol-gel technique, which is low-cost and simple. The multi-layer films consisted of SiO2 and TiO2. The physical phase and morphology of each layer were characterized by atomic force microscopy (AFM). The TiO2 single-layer and SiO2/TiO2 double-layer antireflection coatings were respectively annealed at 150°C, 350°C and 550°C. The sols of TiO2 and SiO2 were aged for 24 hours and then were spin coated on the Si substrate. It was found that the reflectance of double-layer ARCs was generally lower than that of single-layer ones. The reflectance of films without being aged was lower than that of sols were aged for 24 hours. In all samples, the SiO2/TiO2 double-layer film which was annealed at 150°C and which sols were not aged for 24 hours had the lowest reflectance.

Paper Details

Date Published: 11 March 2008
PDF: 4 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69843D (11 March 2008); doi: 10.1117/12.792165
Show Author Affiliations
B. B. Shi, Shanghai Univ. (China)
Z. Q. Ma, Shanghai Univ. (China)
X. Tang, Shanghai Univ. (China)
C. B. Feng, Shanghai Univ. (China)

Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications

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