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Effect of working pressure on the properties of Al2O3/MgF2 HR coatings prepared by electron beam evaporation
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Paper Abstract

The effects of working pressure on the properties of 355nm Al2O3/MgF2 HR coatings were investigated. A series of samples were deposited by electron beam evaporation using the same deposition process at different working pressure. Transmittance of the HR coatings was measured by Lambda 900 spectrometer. Structure of the samples had been characterized by X-ray diffraction (XRD).The stress was measured by viewing the substrate deformation before and after coatings deposition using an optical interferometer, the stress results range from 223MPa to 315MPa. Laser-induced damage threshold (LIDT) was measured by a 351 nm Nd:YAG laser with a pulse width of 7 ns, the LIDT results range from 2.69 J/cm2 to 11.03 J/cm2 with the working pressure changing. It was found that working pressure has important effects on the absorption, stress and LIDT of 355nm Al2O3/MgF2 HR coatings. (351nm, 7ns).The working pressure was no clear effect on the crystalline structure of the HR coatings.

Paper Details

Date Published: 11 March 2008
PDF: 5 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 698422 (11 March 2008); doi: 10.1117/12.792014
Show Author Affiliations
Meiqiong Zhan, Shanghai Second Polytechnic Univ. (China)
Zhonglin Wu, Shanghai Second Polytechnic Univ. (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)

Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications

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