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Proceedings Paper • Open Access

Front Matter: Volume 6882
Author(s): Proceedings of SPIE

Paper Abstract

This PDF file contains the front matter associated with SPIE Proceedings Volume 6882, including the Title Page, Copyright information, Table of Contents, the Conference Committee listing, and Plenary Paper.

Paper Details

Date Published: 28 February 2008
PDF: 14 pages
Proc. SPIE 6882, Micromachining and Microfabrication Process Technology XIII, 688201 (28 February 2008); doi: 10.1117/12.791926
Show Author Affiliations
Proceedings of SPIE, SPIE (United States)


Published in SPIE Proceedings Vol. 6882:
Micromachining and Microfabrication Process Technology XIII
Mary-Ann Maher; Jung-Chih Chiao; Paul J. Resnick, Editor(s)

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