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Proceedings Paper

Ion beam sputter deposition of zirconia thin films
Author(s): Weihua Jin; Chunshui Jin; Lei Liu; Hongli Zhu; Huaijiang Yang
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Paper Abstract

We determined the optical constants (the refractive index n and the extinction coefficient k) of ion beam sputter deposited zirconia thin films with spectroscopic ellipsometry (SE). First, we obtained the structure information (the layer thickness, surface roughness and layer diffusion) by fitting the grazing x-ray reflection (GXRR) spectra. The fitted surface roughness is verified by atomic force micrometer (AFM) measurement. Second, based on the acquired structure information, the measured ellipsometry spectra are fitted in the range of 240-800nm at an incident angle of 70.25 degree. The optical constants are solved based on the Tauc-Lorentz dispersion. The optical band gap extracted by SE is 4.79eV. Finally, the optical band gap is verified by Tauc plot method, which is well consistent with that of SE.

Paper Details

Date Published: 12 March 2008
PDF: 8 pages
Proc. SPIE 6624, International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing, 66241A (12 March 2008); doi: 10.1117/12.791117
Show Author Affiliations
Weihua Jin, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Chunshui Jin, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Lei Liu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Hongli Zhu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Huaijiang Yang, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 6624:
International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing

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