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Proceedings Paper

ZnO/Ag/ZnO multilayer films deposited at room temperature
Author(s): Jinliang Yan; Xueqing Sun; Youliang Zhu; Yinnv Zhao
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Paper Abstract

Transparent conductive ZnO/Ag/ZnO multilayer films were prepared by simultaneous RF magnetron sputtering of ZnO and DC magnetron sputtering of silver at room temperature. A silver film with nanoscale thickness was used as intermediate metallic layers. The crystal structure of the ZnO/Ag/ZnO film was analyzed by X-ray diffraction. The electrical property of the ZnO/Ag/ZnO film was investigated by a linear array four-point probe. The transmittance spectra of the ZnO/Ag/ZnO films were measured using spectrophotometer. A strong ZnO (002) peak is seen for ZnO/Ag/ZnO film, indicating polycrystalline nature and wurtzite structure of ZnO film. Silver has (111) orientation, addition of underlayer ZnO enhances the polycrystallinity of silver layer in ZnO/Ag/ZnO multilayer film. The transmittance decreases in the short wavelength as well as in the long wavelength regions as the thickness of the silver layer is increased. The peak transmittance shifts toward the long wavelength region when the thickness of the two ZnO layers is increased. The electrical and optical properties of the ZnO/Ag/ZnO films depend strongly on the silver film thickness. ZnO/Ag/ZnO multilayer films having high transmittance of 92.5% and low sheet resistance of 4.2Ω/sq. are successfully fabricated and can be reproduced by controlling the preparation process parameters properly.

Paper Details

Date Published: 12 March 2008
PDF: 9 pages
Proc. SPIE 6624, International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing, 662413 (12 March 2008); doi: 10.1117/12.791110
Show Author Affiliations
Jinliang Yan, Ludong Univ. (China)
Xueqing Sun, Ludong Univ. (China)
Youliang Zhu, Ludong Univ. (China)
Yinnv Zhao, Ludong Univ. (China)


Published in SPIE Proceedings Vol. 6624:
International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing

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