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Proceedings Paper

Annular sub-aperture stitching interferometry for testing of large aspherical surfaces
Author(s): Xiao-kun Wang; Li-hui Wang; Li-gong Zheng; Wei-jie Deng; Xue-jun Zhang
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Paper Abstract

Annular subaperture stitching interferometric technology can test large-aperture, high numerical aperture aspheric surfaces with high resolution, low cost and high efficiency without auxiliary null optics. In this paper, the basic principle and theory of the stitching method are introduced, the reasonable mathematical model and effective splicing algorithm are established based on simultaneous least-squares method and Zernike polynomial fitting. The translation errors are eliminated from each subaperture through the synthetical optimization stitching mode, it keeps the error from transmitting and accumulating. The numerical simulations have been carried on by this method. As results, the surface map of the full aperture after stitching is consistent to the input surface map, the difference of PV error and RMS error between them is -0.0074 λ and -0.00052 λ (λ is 632.8nm), respectively; the relative error of PV and RMS is -0.53% and -0.31%; and the PV and RMS of residual error of the full aperture phase distribution is 0.027 λ and 0.0023 λ, respectively. The results conclude that this splicing model and algorithm are accurate and feasible. So it provides another quantitive measurement for test aspheric surfaces especially for large aperture aspheres besides null-compensation.

Paper Details

Date Published: 12 March 2008
PDF: 8 pages
Proc. SPIE 6624, International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing, 66240A (12 March 2008); doi: 10.1117/12.791061
Show Author Affiliations
Xiao-kun Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Li-hui Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Li-gong Zheng, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Wei-jie Deng, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Xue-jun Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 6624:
International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing

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