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Proceedings Paper

The fractal character of micromirror for metal MEMS optical switch
Author(s): Yi Zhang; Yuan Luo; Xiaodong Xu
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Paper Abstract

In this paper, the topographies of various micro-mirror surfaces are measured by Scanning Tunneling Microscope (STM) based on the NiCrAu MEMS optical switch unit which is desined and fabricated by ourselves. Fractal theory and Weierstrass-Mandelbrot function is applied to analyze and simulate the topography of different surfaces. The result shows that the surface of MEMS micromirror which fabricated by metal sputter has low anisotropism and the W-M function is very efficient in creating models and is very useful in analysis the topography of MEMS surface.

Paper Details

Date Published: 12 March 2008
PDF: 6 pages
Proc. SPIE 6624, International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing, 662409 (12 March 2008); doi: 10.1117/12.791060
Show Author Affiliations
Yi Zhang, Chongqing Univ. of Posts and Telecommunications (China)
Yuan Luo, Chongqing Univ. of Posts and Telecommunications (China)
Xiaodong Xu, Chongqing Univ. of Posts and Telecommunications (China)


Published in SPIE Proceedings Vol. 6624:
International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing

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