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Proceedings Paper

Design of IDT for MOEMS angular velocity sensor
Author(s): Yi Zhao; Shufen Chen
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Paper Abstract

The paper presents a novel structure design of Micro-Optic-Electro-Mechanical-System (MOEMS) angular velocity sensor and calculates the design parameters of InterDigital Transducer (IDT). The structure includes light readout system, SAW sensor system and signal processing system. A special point in the structure is adding a optical readout device based on the traditional SAW typed MEMS angular velocity sensor, there would be apparent advantages of higher precision, stronger anti-vibration capacity, and lower difficulty of processing techniques. SAW sensor is the key part of this design, its quality affects the sensitivity of Angular velocity sensor. In this paper, we calculated and simulate the parameter of IDT for MOEMS Angular velocity sensor.

Paper Details

Date Published: 22 February 2008
PDF: 6 pages
Proc. SPIE 6622, International Symposium on Photoelectronic Detection and Imaging 2007: Laser, Ultraviolet, and Terahertz Technology, 66221R (22 February 2008); doi: 10.1117/12.790912
Show Author Affiliations
Yi Zhao, Beijing Institute of Technology (China)
Shufen Chen, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 6622:
International Symposium on Photoelectronic Detection and Imaging 2007: Laser, Ultraviolet, and Terahertz Technology

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